“MEMS” is the abbreviation of Micro-Electro-Mechanical Systems. The device dimensions are in micrometer range in MEMS technology. It is all about designing vibratory structures using Micro-machining technologies (Surface and Bulk micromachining). MEMS has two important components: Actuator and Sensor. The study of MEMS plays very important role in Filter design (RF MEMS), low frequency logic implementation (MEMS based logic gates), Bio-Medical applications (Bio-MEMS), accelerometers used in air bags etc. CoventorWare and Comsol Multiphysics are very popular tools for MEMS designing and simulation. As MEMS is comparatively newer emerging trend in technology, there is enough scope for research opportunities. Now a days, many universities offer this course as a higher semester grad subject or a post grad subject.
The general topics covered by MEMS are:
(1) Electrical and Mechanical Concepts
(2) Actuating and Sensing Schemes
(3) Micro-fabrication Techniques
(4) Micro-machining Techniques
(5) RF MEMS
(6) Bio MEMS
(7) Modeling of MEMS Devices
Following are some of the popular BOOKS suggested for MEMS:
(1) Foundations of MEMS
Authors : Chang Liu
Publisher : Prentice Hall (Pearson)
Buy the Book Online : here
This is one of the basic book to start with MEMS concepts. Concise background and systematic materials in simple language, has kept this book at top of the choice list. The basic analytical formulas of various actuation techniques can be understood from this book. Extensive design problems with practical visualization covered in this book, helps students in strengthening their understanding. This book is referred as a text book for MEMS in many universities.
(2) Microsystem Design
Authors : Stephen D. Senturia
Publisher : Springer
Buy the Book Online : here
The book includes lot of case studies based on real products. One of the striking feature of this book is the fine explanation on MEMS modeling strategies under which Lumped modeling has been emphasized. The Case Study subjects are: piezoelectric rate gyroscope, design and analysis of MEMS accelerometer, pressure sensor, DMD (Digital Mirror Devices) etc. It also includes Bio-MEMS related case studies like Thermal model of the batch reactor & flow reactor useful for DNA amplification and designing of microbridge gas sensor. This book is an ideal choice for finding PG level MEMS project ideas.
(3) Analysis and Design Principles of MEMS Devices
Authors : Minhang Bao
Publisher : Elsevier
Buy the Book Online : here or here
This book presents the analysis and design aspects of MEMS devices. This covers Basic Mechanics, Air damping and Electrostatic driving under Microdynamics. Three most widely used sensing schemes: frequency sensing, capacitive sensing and piezoresistive sensing have been well explained in the book. The book is considered as a suitable source of reference for researchers and engineers in the field.
(4) Fundamentals of Microfabrication (The Science of Miniaturization)
Authors : Marc J. Madou
Publisher : CRC Press
Buy the Book Online : here or here
This book is for understanding various fabrication techniques. For every microfabication techniques like lithography, oxidation etc. a single detailed chapter has been dedicated. The detailed explanation of surface and bulk micromachining techniques with appropriate pictures help understanding the concepts clearly. The book includes updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology. Many more links to the MEMS Journal for reference can be found at end of the book. This book is best recommended for researchers in fabrication field.
Courtesy : Ms. Deeksha Chandola for her Knowledge Transfer to this post