Books for MEMS
“MEMS” is the abbreviation of Micro-Electro-Mechanical Systems. The device dimensions are in micrometer range in MEMS technology. It is all about designing vibratory structures using Micro-machining technologies (Surface and Bulk micromachining). MEMS has two important components: Actuator and Sensor. The study of MEMS plays very important role in Filter design (RF MEMS), low frequency logic implementation (MEMS…